Pressure Sensors

Comprehensive Microsystems

Volumn 2, Issue , 2007, Pages 101-133

  DeHennis, Andrew ^a   Chae, Junseok ^a  

^a Tempe ^*  (United States)

Author keywords

Capacitive pressure sensor; Diaphragm fabrication; Diaphragm mechanics; Integrated pressure sensor; MEMS pressure sensors; Piezoresisitive pressure sensor; Pirani gauge; Pressure sensor packaging; Sensor interface circuitry; Sensor system integration; Sensor circuit integration; Vacuum sensor; Wireless sensors

Indexed keywords

EID: 67651079992     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-044452190-3.00056-2     Document Type: Chapter

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