Cavity-backed MEMS patch antennas on double-layer silicon wafers

IEEE Antennas and Propagation Society, AP-S International Symposium (Digest)

Volumn , Issue , 2006, Pages 3935-3938

  Koga, Yoko ^a   Yoshida, Yukihisa ^b   Yamashita, Akira ^b   Hamaguchi, Tsuneo ^c   Nishizawa, Kazushi ^a   Taguchi, Motohisa ^b   Nishino, Tamotsu ^a   Miyashita, Hiroaki ^a   Makino, Shigeru ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b Advanced Technology R D Center

^c Manufacturing Engineering Center   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 67651012627     PISSN: 15223965     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APS.2006.1711486     Document Type: Conference Paper

References (5)

1. Vijay K.Varadan, K. J. Vinoy, and K. A. Jose, RF MEMS and Their Applications, John Wiley&Sons, 2002
2. I. Papapolymerou, R. F. Drayton, and L. P. B. Katehi, “Micromachined Patch Antennas”, IEEE Trans. Antennas Propagat., vol. 46, no. 2, pp. 275-283, Feb. 1998.
3. G. P. Gauthier, J.-P. Raskin, L. P. B. Katehi, and G. M. Rebeiz, “A 94-GHz Aperture-Coupled Micromachined Microstrip Antenna”, IEEE Trans. Antennas Propagat., vol. 47, no. 12, pp. 1761-1766, Dec. 1999.
4. Y. Koga, K. Nishizawa, T. Nishino, Y. Yosida, H. Miyashita, and S. Makino, “Characteristics of patch antennas on a double-layer silicon wafer”, Proc. IEICE Gen. Conf. '05. B-1-194, p.194 (in Japanese).
5. Y. Yoshida, Y. Koga, A. Yamashita, K. Nishizawa, Y. Yokoyama, Y. Fujii, T. Hamaguchi, T. Nishino, M. Taguchi, and M. Takeda, “A millimeterwave microstrip antenna with micromachined wafer-level stacking structure,” MEMS 2006, Istanbul.