Design and control of dual-stage feed drive system in ultra-precision machine tools

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 17, Issue 6, 2009, Pages 1426-1430

  Li, Guo ^a   Wang, Bo ^a   Dong, Shen ^a   Wang, Shi Lei ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Control algorithm; Dual stage drive micro displacement system; Switching controller

Indexed keywords

CONTROL ALGORITHM; CONTROL ALGORITHMS; DESIGN AND CONTROL; DISPLACEMENT RESOLUTION; DISTRIBUTION MODULE; DUAL STAGE; DUAL-STAGE DRIVE MICRO-DISPLACEMENT SYSTEM; FAST RESPONSE; FEED DRIVE; FEED DRIVE SYSTEMS; FINE RESOLUTION; HIGH RESOLUTION; LARGE-STROKE; LASER INTERFEROMETER; MOTION COORDINATION; MULTIPLE MODELS; POSITIONING ACCURACY; STEP MOTOR; SWITCHING CONTROLLER; SWITCHING CONTROLLERS; ULTRA PRECISION; ULTRA-PRECISION MACHINE TOOLS;

AUTOMOBILE EXHIBITIONS; INTERFEROMETERS; LASER INTERFEROMETRY; MACHINE DESIGN; MACHINE TOOLS; MICROACTUATORS; MOTORS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PRECISION ENGINEERING; STEPPING MOTORS;

CONTROLLERS;

EID: 67651011467     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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