On-chip magnetoresistive detection of resonance in microcantilevers

Applied Physics Letters

Volumn 95, Issue 2, 2009, Pages

  Patil, S B ^a   Guedes, A ^a,b   Freitas, P P ^a,b   Cardoso, S ^a,b   Chu, V ^a   Conde, J P ^a,b  

^a INESC   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTION LIMITS; FREE END; MAGNETORESISTIVE; MECHANICAL RESONANCE; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-CANTILEVERS; ON CHIPS; RESONANCE FREQUENCIES; SPIN-VALVE SENSORS;

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; ELECTROSTATIC ACTUATORS; MAGNETIC FIELDS; MAGNETS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; RESONANCE; SENSORS; SPIN DYNAMICS;

VALVES (MECHANICAL);

EID: 67650763503     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3174912     Document Type: Article

References (16)

1. A. A. Seshia, M. Palaniapan, T. A. Roessig, R. T. Howe, R. W. Gooch, T. R. Schimert and S. Montague, J. Microelectromech. Syst. 1057-7157 11, 784 (2002). 10.1109/JMEMS.2002.805207
2. J. Greenwood and T. Wray, Sens. Actuators, A 0924-4247 37, 82 (1993). 10.1016/0924-4247(93)80017-B
3. C. T. C. Nguyen, L. P. B. Katehi, and G. M. Rebeiz, Proc. IEEE 0018-9219 86, 1756 (1998). 10.1109/5.704281
4. R. Chunara, M. Godin, S. Knudsen, and S. Manalis, Appl. Phys. Lett. 0003-6951 91, 193902 (2007). 10.1063/1.2806197
5. A. Gupta, D. Akin, and R. Bashir, Appl. Phys. Lett. 0003-6951 84, 1976 (2004). 10.1063/1.1667011
6. M. Li, H. X. Tang, and M. L. Roukes, Nat. Nanotechnol. 1748-3387 2, 114 (2007). 10.1038/nnano.2006.208
7. G. Shekhawat, S. Tark, and V. P. Dravid, Science 0036-8075 311, 1592 (2006). 10.1126/science.1122588
8. D. W. Carr, L. Sekaric, and H. G. Craighead, J. Vac. Sci. Technol. B 1071-1023 16, 3821 (1998). 10.1116/1.590416
9. A. N. Cleland and M. L. Roukes, Appl. Phys. Lett. 0003-6951 69, 2653 (1996). 10.1063/1.117548
10. A. Guedes, S. B. Patil, S. Cardoso, V. Chu, J. P. Conde, P. P. Freitas, J. Appl. Phys. 0021-8979 103, 07E924 (2008). 10.1063/1.2837661
11. A. S. Edelstein and G. A. Fischer, J. Appl. Phys. 0021-8979 91, 7795 (2002). 10.1063/1.1451901
12. J. Gaspar, H. Li, P. P. Freitas, V. Chu, and J. P. Conde, J. Microelectromech. Syst. 1057-7157 12, 550 (2003). 10.1109/JMEMS.2003.817890
13. B. Dieny, V. S. Speriosu, S. Metin, S. S. P. Parkin, B. A. Gumey, P. Baumgart, and D. R. Wilhoit, J. Appl. Phys. 0021-8979 69, 4774 (1991). 10.1063/1.348252
14. P. P. Freitas and H. Ferreira, in Handbook of Magnetism and Advanced Magnetic Materials, edited by, H. Kroenmuller, and, S. S. Parkin, (Wiley, New York, 2007), Vol. IV, Chap..
15. J. Gaspar, V. Chu, and J. P. Conde, J. Appl. Phys. 0021-8979 97, 094501 (2005). 10.1063/1.1877820
16. S. Russek, S. Kaka, and M. Donahue, J. Appl. Phys. 0021-8979 87, 7070 (2000). 10.1063/1.372934