CMOS sensor array for bi-directional communication with electrically active cells

Proceedings of the 10th International Conference on ULtimate Integration of Silicon, ULIS 2009

Volumn , Issue , 2009, Pages 237-240

  Yegin, U ^a   Schindler, M ^a   Ingebrandt, S ^a   Eick, S ^a   Kim, S K ^a,b   Hwang, C S ^b   Schindler, C ^a   Schubert, J ^a   Schroeder, H ^a   Offenhauser A ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BASE LAYERS; BI-DIRECTIONAL COMMUNICATION; CAPACITIVE COUPLINGS; CMOS SENSOR ARRAYS; ELECTRICAL SIGNAL; FLOATING GATES; HIGH-K MATERIALS; LIFT-OFF PROCESS; METAL CMOS PROCESS; PACKED ARRAYS; POST PROCESSING; SILICON CHIP;

PLATINUM; SENSOR ARRAYS;

FIELD EFFECT TRANSISTORS;

EID: 67650681173     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULIS.2009.4897580     Document Type: Conference Paper

References (4)

1. Björn Eversmann et al. "A 128x128 CMOS Biosensor Array for Extracellular Recording of neural activity" IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 38, NO. 12, DECEMBER 2003
2. Andreas Offenhausser, Jurgen Ruhe, Wolfgang Knoll, "Neuronal cells cultured on modified microelectronic device surfaces", J. Vac. Sci. Technol. A, 13, pp. 2606-2612, 1995
3. Sven Meyburg et al., "N-Channel field-effect transistors with floating gates for extracellular recordings", Biosensors and Bioelectronics, 21, pp. 1037, 2006
4. T. Remmel, M. Schulberg, S. Fujimura, H. Honma, H. Kobayashi, H. Kohno, S. Owens, R. Deslattes, J. Pedulla, "Barium Strontium Titanate Thin Film Analysis", JCPDS-International Centre for Diffraction Data 2000,Advances in X-ray Analysis, Vol.43