Correlation between processing and properties of titanium oxycarbide, TiCxOy, thin films

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Fernandes, Ana C ^a   Carvalho, Pedro ^a   Vaz, Filipe ^a   Parreira, Nuno M G ^b   Goudeau, Philippe ^c   Le Bourhis, Eric ^c   Rivière, Jean Paul ^c  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF COIMBRA   (Portugal)

^c UNIVERSITÉ DE POITIERS   (France)

Author keywords

Mechanical properties; Nanocomposites; Sputtering; Thin films; Ti C O coatings

Indexed keywords

DC REACTIVE MAGNETRON SPUTTERING; FACE-CENTERED CUBIC; FILM PROPERTIES; OXYCARBIDES; OXYGEN CONTENT; OXYGEN FLOW; PREPARATION CONDITIONS; STRUCTURAL FEATURE; TI-C-O COATINGS;

COATINGS; FILM PREPARATION; NANOCOMPOSITES; OXYGEN; TEMPERATURE INDICATING CAMERAS; THIN FILMS; TITANIUM; TITANIUM CARBIDE; TITANIUM OXIDES; X RAY DIFFRACTION;

MECHANICAL PROPERTIES;

EID: 67650623750     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200730407     Document Type: Conference Paper

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