Superconformal electrodeposition of Co and Co-Fe alloys using 2-mercapto-5-benzimidazolesulfonic acid

Journal of the Electrochemical Society

Volumn 156, Issue 8, 2009, Pages

  Lee, Chang Hwa ^a   Bonevich, John E ^a   Davies, Joseph E ^a   Moffat, Thomas P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

2-MERCAPTO-5-BENZIMIDAZOLESULFONIC ACID; ALLOY DEPOSITS; ANALYTICAL TRANSMISSION ELECTRON MICROSCOPY; CO DEPOSITION; FILLED TRENCH; INTERFACE SHAPE; METAL DEPOSITION; POSITIVE FEEDBACK; PROTON REDUCTION; SUBMICROMETER TRENCHES; SUPERCONFORMAL ELECTRODEPOSITION; TRENCH FILLINGS; V-NOTCH; VOID-FREE;

ACIDS; ADSORPTION; ALLOYS; DESORPTION; ELECTRODEPOSITION; FEEDBACK; MAGNETIC PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY;

IRON ALLOYS;

EID: 67650578512     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3142427     Document Type: Article

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