Magnetron deposition of in situ thermoelectric Mg 2Ge thin films

Journal of Electronic Materials

Volumn 38, Issue 7, 2009, Pages 1008-1012

  Chuang, L ^a,b   Savvides, N ^a   Li, S ^b  

^a CSIRO   (Australia)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Mg 2Ge; Seebeck coefficient; Thermoelectric; Thin films

Indexed keywords

BROAD TEMPERATURE RANGES; ELECTRICAL CONDUCTIVITY; GE THIN FILMS; GLASS SUBSTRATES; HIGH-PURITY; HIGHER T; IN-SITU; MAGNETRON CO-SPUTTERING; MAGNETRON DEPOSITION; MG 2GE; OPTIMUM DEPOSITION; RICH PHASE; SEMICONDUCTING COMPOUNDS; SUBSTRATE TEMPERATURE; THERMOELECTRIC; X-RAY PEAKS;

ELECTRIC CONDUCTIVITY; MAGNESIUM; MAGNETRONS; SEEBECK COEFFICIENT; SEMICONDUCTING FILMS; SUBSTRATES; THIN FILMS;

GERMANIUM;

EID: 67650480208     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-009-0690-x     Document Type: Conference Paper

References (25)

1. Putley, E. H.: The Hall Effect and Semiconductor Physics. Dover, N.Y (1960)
2. R.D. Redin R.G. Morris G.C. Danielson 1958 Phys. Rev. 109 1916 10.1103/PhysRev.109.1916
3. B.D. Lichter 1962 J. Electrochem. Soc. 109 819 10.1149/1.2425561
4. R.J. LaBotz D.R. Mason D.F. O'Kane 1963 J. Electrochem. Soc. 110 127 10.1149/1.2425689
5. V.K. Zaitsev M.I. Fedorov E.A. Gurieva I.S. Eremin P.P. Konstantinov A.Y. Samumin M.V. Vedernikov 2006 Phys. Rev. B 74 045207 10.1103/PhysRevB.74.045207
6. M.I. Fedorov, V.K. Zaitsev, and M.V. Vedernikov, Proceedings of the 25 th International Conference on Thermoelectrics, Vienna, August 2006 (IEEE, 2006)
7. F.D. Rosi 1968 Solid State Electron. 11 833 10.1016/0038-1101(68)90104-4
8. Cookm, B.A. and Harringa, J.L.: Thermoelectrics Handbook, Ed. D. M. Rowe (CRC Press, Taylor and Francis, Boca Raton, 2006), p. 19-1
9. N. Savvides H.H. Goldsmid 1972 Phys. Lett. 41A 193
10. N. Savvides H.J. Goldsmid 1973 J. Phys. C: Solid State Phys. 6 1701 10.1088/0022-3719/6/10/006
11. N. Savvides H.J. Goldsmid 1980 J. Phys. C.: Solid State Phys. 13 4671 10.1088/0022-3719/13/25/010
12. N. Savvides H.J. Goldsmid 1981 Phys. Status Solidi B 103 K13 10.1002/pssb.2221030153
13. D.M. Rowe V.S. Shukla N. Savvides 1981 Nature 290 765 10.1038/290765a0
14. A.I. Holchbaum R. Chen R.D. Delgado W. Liang E.C. Garnett M. Najarian A. Majumdar P. Yang 2008 Nature 451 163 10.1038/nature06381
15. C. Lee A. Venkatasubramanian 1997 Appl. Phys. Lett. 70 2957
16. R. Venkatasubramanian 2001 Nature 413 597 10.1038/35098012
17. G.J. Snyder J.R. Lim C.-K. Huang J.-P. Fleurial 2003 Nat. Mater. 2 528 10.1038/nmat943
18. H. Bottner, Proceedings of the 24 th International Conference on Thermoelectrics (Clemson, USA, 2005), p. 1.
19. E.J. Guilbeau and B.C. Towe, U.S. patent 4935345 (1990)
20. N. Savvides 1988 Thin Solid Films 163 13 10.1016/0040-6090(88)90406-3
21. N. Savvides D.R. [tmp] McKenzie R.C. [tmp] McPhedran 1983 Solid State Commun. 48 189 10.1016/0038-1098(83)90956-0
22. N. Savvides A. Katsaros 1994 Physica C 226 23 10.1016/0921-4534(94)90473- 1
23. Moffatt, W. G.: The Handbook of Binary Phase Diagrams. Genium, Schenectady, N.Y. (1981)
24. T. Aizawa R. Song A. Yamamoto 2005 Mater. Trans. 46 1490 10.2320/matertrans.46.1490
25. N. Savvides A. Thorley S. Gnanarajan A. Katsaros 2001 Thin Solid Films 388 177 10.2320/matertrans.46.1490