A nodal analysis method for electromechanical behavior simulation of bow-tie shaped microbeams

Microsystem Technologies

Volumn 15, Issue 7, 2009, Pages 985-991

  Li, Min ^a   Huang, Qing An ^a   Li, Wei Hua ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BEHAVIORAL MODEL; BOW TIE; ELECTROMECHANICAL BEHAVIOR; EXPERIMENTAL DATA; FEA SIMULATION; GALERKIN RESIDUAL METHOD; MEMSDEVICES; MICRO BEAMS; NODAL ANALYSIS METHOD; NODAL MODELS; NON-LINEARITY; OPTIMUM DESIGNS;

PARTIAL DIFFERENTIAL EQUATIONS;

SIMULATORS;

EID: 67650383732     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0819-0     Document Type: Article

References (22)

1. S Chen TV Baughn ZJ Yao 2002 A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structure J Microelectromech Syst 11 309 316 10.1109/JMEMS.2002.800936
2. Clark JV, Zhou N, Pister KSJ (1998) Fast, accurate MEMS simulation using SUGAR v0.5. In: Proceedings of the IEEE solid-state sensors and actuators workshop, pp 191-196
3. Craig RR (1981) Structural dynamics. Wiley, New York
4. CL Goldsmith Z Yao S Eshelman 1998 Performance of low-loss RF MEMS capacitive switches Microw Guid Wave Lett 8 269 271 10.1109/75.704410 (Pubitemid 128446303)
5. Huebner KH, Dewhirst DL, Smith DE et al (2001) The finite element method for engineers, 4th edn. Wiley, New York
6. ES Hung SD Senturia 1999 Extending the travel range of analog-tuned electrostatic actuators J Microelectromech Syst 8 497 505 (Pubitemid 30552578)
7. Jing Q (2003) Model and simulation for design of suspended MEMS. Ph.D. Dissertation, Carnegie Mellon University
8. SP Levitan JA Martinez TP Kurzweg 2003 System simulation of mixed-signal multi-domain microsystems with piecewise linear models IEEE Trans Comput Aided Des Integr Circuits Syst 22 139 153
9. M Li Q-A Huang W-H Li 2006 A nodal analysis method for an electrically actuated microbeam Chin J Sens Actuators 19 1364 1367
10. R-G Li Q-A Huang W-H Li 2007 A nodal analysis method for simulating the behavior of electrothermal microactuators Microsyst Technol 14 119 129
11. JB Muldavin GM Rebeiz 2001 Inline capacitive and DC-Contact MEMS shunt switches Microw Wirel Comp Lett 11 334 336 10.1109/7260.941781
12. H Sadeghian G Rezazadeh PM Osterberg 2007 Application of the generalized differential quadrature method to the study of pull-In phenomena of MEMS switches J Microelectromech Syst 16 1334 1340 (Pubitemid 350239125)
13. Senturia SD (2000) Microsystem design. Kluwer Academic, Boston
14. HAC Tilmans 1996 Equivalent circuit representation of electromechanical transducers: I lumpeded-parameter systems J Micromech Microeng 6 157 176 (Pubitemid 126614879)
15. Vandemeer JE, Kranz MS, Fedder GK (1997) Nodal simulation of suspended MEMS with multiple degrees of freedom. In: Proceedings of 1997 ASME international mechanical engineering congress and exposition (IMECE'97), pp 113-118 (Pubitemid 127655595)
16. Vandemeer JE, Kranz MS, Fedder GK (1998) Hierarchical representation and simulation of micromachined inertial sensors. In: Proceedings of the international conference on modeling and simulation of microsystems, semiconductors, sensors and actuators (MSM'98), pp 540-545
17. Wong G (2004) Behavioral modeling and simulation of MEMS electrostatic and thermomechanical effects. Ph.D. Dissertation, Carnegie Mellon University
18. ZJ Yao S Chen S Eshelman 1999 Micromachined low-loss microwave switches J Microelectromech Syst 8 129 134 10.1109/84.767108
19. Zhou N (2002) Simulation and synthesis of microelectromechanical systems. Ph.D. Dissertation, UC Berkeley
20. Zhou N, Clark JV, Pister KSJ (1998) Nodal simulation for MEMS design using SUGAR v0.5. In: Proceedings of the international conference on modeling and simulation of microsystems, semiconductors, sensors and actuators (MSM'98), pp 308-313
21. Zhu Y, Espinosa HD (2003) Design of radio frequency (RF) MEMS switches-modeling. In: Proceedings of 2003 ASME International Mechanical Engineering Congress and Exposition (IMECE'03), pp 1-6
22. Y Zhu HD Espinosa 2004 Effect of temperature on capacitive RF MEMS switch performance-a coupled-field analysis J Micromech Microeng 14 1270 1279 10.1088/0960-1317/14/8/021