A digital output piezoelectric accelerometer for ultra-low power wireless sensor node

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 542-545

  Toshihiro, Itoh ^a   Takeshi, Kobayashi ^b   Hironao, Okadatoshihiro ^b   Takashi, Masuda ^c   Tadatomo, Suga ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

A/D CONVERTER; CMOS SWITCH; DIGITAL OUTPUT; FABRICATION PROCESS; PARALLEL PLATE CAPACITORS; PIEZO-ELECTRIC ACCELEROMETERS; PIEZO-ELECTRIC EFFECTS; PIEZOELECTRIC THIN FILMS; PZT; SOI WAFERS; ULTRA-LOW POWER; WIRELESS SENSOR NODE;

ACCELEROMETERS; BANDPASS AMPLIFIERS; ELECTRIC NETWORK SYNTHESIS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTOR SWITCHES; SENSORS; SILICON WAFERS; SWITCHES; TELECOMMUNICATION EQUIPMENT; THIN FILMS;

SENSOR NODES;

EID: 67650093234     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716497     Document Type: Conference Paper

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