Suspension-compatible elastomer-glass micropumps employing a linear topology

IET Seminar Digest

Volumn 2006, Issue 11367, 2006, Pages 31-38

  Tracey, M C ^a   Johnston, I D ^a   Davis, J B ^a   Tan, C K L ^a  

^a UNIVERSITY OF HERTFORDSHIRE   (United Kingdom)

Author keywords

Elastomer; Micropump; Soft lithography; Suspension compatible

Indexed keywords

ACTIVE REGIONS; BACK PRESSURES; CONTROL STRUCTURE; ELASTOMERIC SUBSTRATES; FLOW CHANNELS; LINEAR PUMPS; LINEAR TOPOLOGY; MICROPUMP; OPERATING FREQUENCY; POLYSTYRENE BEADS; PUMP CHAMBERS; PUMPING PERFORMANCE; PUMPING RATE; SINGLE ACTUATORS; SOFT-LITHOGRAPHY; SOLID PHASE SUSPENSIONS; SOLID SUBSTRATES; SUSPENSION-COMPATIBLE;

ACTUATORS; AIR EJECTORS; CHANNEL FLOW; FREQUENCY RESPONSE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PLASTICS; POLYSTYRENES; RUBBER; SUMP PUMPS;

SUSPENSIONS (FLUIDS);

EID: 67649995694     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1049/ic:20060443     Document Type: Conference Paper

References (6)

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