A capacitive biosensor based on ultrathin si membranes

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 223-226

  Tsouti, V ^a   Goustouridis, D ^a   Chatzandroulis, S ^a   Normand, P ^a   Andreakou, P ^b   Ioannou, M ^b   Kafetzopoulos, D ^b   Boutopoulos, C ^c   Zergioti, I ^c   Tsoukalas, D ^c   Hue, J ^d   Rousier, R ^d  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b INSTITUTE OF MOLECULAR BIOLOGY AND BIOTECHNOLOGY   (Greece)

^c NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

^d CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL INTERACTIONS; BIOLOGICAL TARGETS; BIOMOLECULAR INTERACTIONS; CAPACITIVE BIOSENSORS; DEVICE CAPACITANCE; SURFACE STRESS; ULTRA-THIN; ULTRATHIN SILICON MEMBRANE;

SIGNAL TRANSDUCTION; SURFACE PROPERTIES;

BIOSENSORS;

EID: 67649974906     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716421     Document Type: Conference Paper

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