Wafer level characterization and failure analysis of microsensors and actuators

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 144-147

  De Wolf, Ingrid ^a,b   De Coster, Jeroen ^a   Pedreira, Olalla Valera ^a   Haspeslagh, Luc ^a   Witvrouw, Ann ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROLLED MOTIONS; DIFFERENTIAL INTERFERENCE CONTRAST; FUNCTIONAL YIELD; IN-LINE; LASER DOPPLER VIBROMETRY; OPTICAL INSPECTION; OPTICAL INTERFEROMETRY; OPTICAL INVESTIGATION; RELIABILITY TESTING; SET-UPS; WAFER LEVEL;

ACTUATORS; FAILURE ANALYSIS; LASER DOPPLER VELOCIMETERS; MICROSENSORS; OPTICAL TESTING; QUALITY ASSURANCE; SAFETY FACTOR;

NANOSENSORS;

EID: 67649947162     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716404     Document Type: Conference Paper

References (5)

1. http://www.veeco.com/products/Metrology-and-Instrumentation/ Optical-Profilers/Wyko-DMEMS-NT3300/
2. th Int. Laser Metrology Symposium, Singapore, 2008
3. http://www.polytec.com/ger/default.asp
4. th Int. Laser Metrology Symposium, Singapore, 2008, 9pp.
5. K. Briechle and U.D. Hanebeck, "Template matching using fast normalized cross correlation," Proc. of SPIE, AeroSense Symposium, Orlando, Florida, 1995, pp. 4387-4395.