Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 2111-2114

  Wygant, Ira O ^a   Kupnik, Mario ^b   Khuri Yakub, Butrus T ^b  

^a NATIONAL SEMICONDUCTOR CORPORATION   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL APPROACH; CIRCULAR PLATES; DESIGN EQUATION; EQUIVALENT CIRCUIT MODEL; EQUIVALENT CIRCUIT PARAMETER; EQUIVALENT MASS; FEM ANALYSIS; LARGE-SIGNAL; MASS-SPRING-DAMPER MODELS; MEMBRANE DISPLACEMENT; MEMS-STRUCTURE; PULL-IN; SMALL SIGNAL EQUIVALENT CIRCUIT; SMALL SIGNAL MODEL;

CELL MEMBRANES; CIRCUIT THEORY; DAMPING; DESIGN; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; HETEROJUNCTION BIPOLAR TRANSISTORS; ULTRASONIC TRANSDUCERS;

MODEL STRUCTURES;

EID: 67649386878     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0522     Document Type: Conference Paper

References (5)

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