Design and fabrication of passive wireless SAW sensor for pressure measurement

IEEJ Transactions on Sensors and Micromachines

Volumn 128, Issue 5, 2008, Pages 230-234

  Hashimoto, Shuhei ^a   Kuypers, Jan H ^b   Tanaka, Shuji ^b   Esashi, Masayoshi ^b  

^a NISSAN MOTOR CO   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Hermetic sealing; Lithium niobate (LiNbO3); Pressure sensor; SAW delay line; Surface acoustic wave (SAW); Wireless sensor

Indexed keywords

HERMETIC SEALING; LITHIUM NIOBATE; LITHIUM NIOBATE (LINBO3); SAW DELAY LINE; SURFACE ACOUSTIC WAVES; WIRELESS SENSOR;

ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ELECTRIC CURRENTS; ELECTRIC DELAY LINES; FABRICATION; LITHIUM; NIOBIUM COMPOUNDS; PRESSURE MEASUREMENT; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SUBSTRATES; TIME DIVISION MULTIPLE ACCESS; TIRES; ULTRASONIC TRANSDUCERS; WAVES;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 67649322531     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.128.230     Document Type: Article

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