Study of thick microporous silicon layer from highly resistive silicon

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 6, 2009, Pages 3652-3656

  Semai, Jugurtha ^a   Gautier, Gaël ^a   Ventura, Laurent ^a  

^a UNIVERSITÉ DE TOURS   (France)

Author keywords

Acetic acid; Macroporous silicon; Microporous silicon; Porosity; Porous silicon; Thickness

Indexed keywords

ANODIZATION; LOW-DOPED SILICON; MACROPOROUS SILICON; METALLIZATION; MICROPOROUS SI; MICROPOROUS SILICON; P-TYPE SI; PARTICULAR SOLUTION; PORE DIMENSIONS; POROUS SILICON SURFACES; POWER ELECTRONIC APPLICATIONS; PROMISING MATERIALS; STRUCTURE INTEGRITY; THICKNESS;

ACETIC ACID; ACIDS; HYDROFLUORIC ACID; METAL ANALYSIS; MICROPOROSITY; PH EFFECTS;

POROUS SILICON;

EID: 67649236772     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.NS46     Document Type: Conference Paper

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