Fabrication of large-scale mono-crystalline silicon micro-mirror arrays using adhesive wafer transfer bonding

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7208, Issue , 2009, Pages

  Zimmer, Fabian ^a   Niklaus, Frank ^b   Lapisa, Martin ^b   Ludewig, Thomas ^a   Bring, Martin ^a   Friedrichs, Martin ^a   Bakke, Thor ^c   Schenk, Harald ^a   Van Der Wijngaart, Wouter ^b  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^c SINTEF   (Norway)

Author keywords

Adhesive bonding; Micro mirrors; Optical MEMS; Spatial light modulator

Indexed keywords

ADHESIVE BONDING; BENZOCYCLOBUTENE; BOND PROCESS; BURIED OXIDE LAYERS; CMOS COMPATIBLE; CMOS PROCESS; CMOS WAFERS; CRYSTALLINE SILICONS; DONOR WAFERS; DUV LITHOGRAPHY; FABRICATION PROCESS; FULLY COMPATIBLE; LOW TEMPERATURES; MICRO MIRROR; MICRO MIRRORS; MICROMIRROR ARRAY; MIRROR MATERIALS; OPTICAL MEMS; PLANARITY; SPATIAL LIGHT MODULATOR; SPATIAL LIGHT MODULATORS; THIN SILICON MEMBRANE; WAFER TRANSFERS;

BUTENES; CRYSTALLINE MATERIALS; EPITAXIAL GROWTH; LIGHT; LIGHT MODULATION; LIGHT MODULATORS; MECHANICAL PROPERTIES; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; POLYSILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

WAFER BONDING;

EID: 67649183018     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.808694     Document Type: Conference Paper

References (5)

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