Automation needs reach new levels

Semiconductor International

Volumn 23, Issue 8, 2000, Pages

  Gartland, Karl ^a,b,c,d   Sherwood, Ed ^a,c,e  

^a IBM MICROELECTRONICS   (United States)

^b UNIVERSITY OF MASSACHUSETTS   (United States)

^c IBM   (United States)

^d LEHIGH UNIVERSITY   (United States)

^e Farleigh Dickinson University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED MATERIAL HANDLING SYSTEMS; MANUFACTURING EXECUTION SYSTEM; MATERIAL CONTROL SYSTEM; RECIPE MANAGEMENT;

COMPUTER CONTROL SYSTEMS; COMPUTER INTEGRATED MANUFACTURING; COST EFFECTIVENESS; FACTORY AUTOMATION; MANAGEMENT INFORMATION SYSTEMS; MATERIALS HANDLING; PROCESS CONTROL; PRODUCTIVITY; ROBOTICS; SCHEDULING; STANDARDS; STORAGE (MATERIALS);

INTEGRATED CIRCUIT MANUFACTURE;

EID: 6744260811     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. International Technology Roadmap for Semiconductors, 1999.
2. Global Joint Guidance for 300 mm Semiconductor Factories, I300I and J300, 1997.
3. CIM Global Joint Guidelines for 300 mm Semiconductor Factories, Release 5, International Sematech and J 300E.
4. I300I Factory Guidelines, Version 4.2