Assessing the environmental impact of copper CMP

Semiconductor International

Volumn 23, Issue 12, 2000, Pages

  Maag, Benoît ^a,b,c,d   Boning, Duane ^a,e,f,g   Voelker, Bettina ^a,h  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Semiconduct Optical Fiber Div S   (France)

^c ECOLE POLYTECHNIQUE   (France)

^d ENSTA PARISTECH   (France)

^e Massachusetts Institute of Technology Cambridge   (United States)

^f TEXAS INSTRUMENTS   (United States)

^g ON SEMICONDUCTOR   (United States)

^h ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; COPPER HYDROXIDE; COPPER INTERCONNECT TECHNOLOGY; CUPRIC ION; ULTRAPURE WATER;

AGENTS; CHEMICAL POLISHING; CHEMICALS REMOVAL (WATER TREATMENT); COMPLEXATION; COPPER OXIDES; EFFLUENTS; ENVIRONMENTAL IMPACT; POSITIVE IONS; PRECIPITATION (CHEMICAL); WASTEWATER DISPOSAL; WATER;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 6744248636     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. Semiconductor Industry Association, International Technology Roadmap for Semiconductors, 1999, p. 253
2. "Report to Consumers on Your Drinking Water," Massachusetts Water Resources Authority, 1998.
3. B. Maag, "The Environmental Impact of Copper CMP," MIT MEng Thesis, June 2000.
4. Introduction to the National Pretreatment Program, EPA-833-B-98-002, February 1999
5. www epa.gov/owm/enhance/pd/ owm0145.pdf
6. www.epa.gov/ooaujeag/projectxl/ibm2/ lbmfpa5 pdf
7. Franklin Associates, Characterization of Municipal Solid Waste in the United States, 1998 update. report prepared for the EPA. EPA #350.
8. J.O. Nriagu, Copper in the Environment, John Wiley & Sons, 1979
9. USGS, Copper Hazards to Fish, Wildlife and Invertebrates: A Synoptic Review, Biological Science Report 1997, USGS/BRD/ BRS-1997-0002.
10. H. Chua et al, "Sub-lethal Effects of Heavy Metals on Activated Sludge Microorganisms," Chemosphere, Vol 39, No. 15, p. 2681
11. A. Ekster and D. Jenkins, "Nickel and Copper Removal at the San Jose/Santa Clara Water Pollution Control Plant," Water Environment Research. Vol. 68, No 7, Nov-Dec 1996.