Case for continuous flow transport of wafer carriers

Semiconductor International

Volumn 23, Issue 8, 2000, Pages

  Feindel, David ^a,b,c   Kaempf, Ulrich ^a,d,e,f,g  

^a Asyst Technologies Inc   (United States)

^b Transport Products Group

^c CASE WESTERN RESERVE UNIVERSITY   (United States)

^d HP's Inkjet Wafer Fab   (United States)

^e SEMATECH   (United States)

^f Bern State Institute of Engineering   (Switzerland)

^g Asyst Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUOUS FLOW TRANSPORT; INTERBAY TRANSPORT; MANUFACTURING EXECUTION SYSTEM; WAFER CARRIERS;

ACCIDENT PREVENTION; COMPUTER AIDED SOFTWARE ENGINEERING; CONVEYORS; FACTORY AUTOMATION; MATERIALS HANDLING; REAL TIME SYSTEMS; ROBOTICS; STANDARDIZATION; TECHNOLOGY TRANSFER;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 6744237811     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. 1999 International Technology Roadmap for Semiconductors, 1999 Edition, section Factory Integration.
2. Aaron Slettenhaugh et al, "Impact of Lot Buffering on Overall Equipment Effectiveness," Semiconductor International, July 1998, p. 153.
3. U. Kaempf, "Automated Transport in the Wafer Fab," SEMI/IEEE 1997 Advanced Semiconductor Manufacturing Conference.
4. Peter Csatary et al, "300 mm Fab Layout and Automation Concepts," Future FaO, Issue 5.
5. Semiconductor Equipment and Materials International, 805 East Middlefield Rd., Mountain View, Calif. 94043, USA