Lithographically-induced self-assembly of periodic micro-pillar arrays in a single homopolymer film

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Volumn 41, Issue 1, 2000, Pages 78-

  Chou, Stephen Y ^a   Zhuang, Lei ^a   Deshpande, Paru ^a   Chen, Lei ^a   Sun, Xiaoyun ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODYNAMICS; HYDRODYNAMICS; LITHOGRAPHY; MASKS; THIN FILMS;

LITHOGRAPHICALLY-INDUCED SELF-ASSEMBLY (LISA);

PLASTIC FILMS;

EID: 6744226357     PISSN: 00323934     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (1)

1. S.Y. Chou and L. Zhuang, March Meeting of American Physical Society, March 1999, and J Vac Sci. and Technology, in press.