Effect of ammonia treatment on laser-induced damage of nano-porous silica film

Optik

Volumn 120, Issue 9, 2009, Pages 437-441

  Guo, Y J ^a,b   Zu, X T ^a   Jiang, X D ^b   Yuan, X D ^b   Xu, S Z ^a,b   Lv, H B ^b   Wang, B Y ^a,b  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Ammonia treatment; LIDT; Porous ratio; Silica film; Weak absorption

Indexed keywords

AMMONIA TREATMENT; LIDT; POROUS RATIO; SILICA FILM; WEAK ABSORPTION;

ABRASION; GAS ABSORPTION; GELATION; GELS; LASER DAMAGE; LASERS; OPTICAL MICROSCOPY; SILICA; SOL-GEL PROCESS; SOL-GELS; SOLS; WEAR RESISTANCE;

AMMONIA;

EID: 67349265484     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijleo.2007.11.001     Document Type: Article

References (9)

1. Wu G.M., et al. Properties of sol-gel derived scratch-resistant nano-porous silica films by a mixed atmosphere treatment. J. Non-Cryst. Solids 275 (2000) 169-174
2. Floch H.G., and Belleville P.F. A scratch-resistant single-layer antireflective coating by a low temperature sol-gel route. SPIE 1758 (1994) 135-149
3. Haereid S., et al. Preparation and properties of monolithic silica xerogels from TEOS-based alcogels aged in silane solutions. J. Non-Cryst. Solids 186 (1995) 96-103
4. Einarsrud M.A., and Nilson E. Strengthening of water glass and colloidal sol based silica gels by aging in TEOS. J. Non-Cryst. Solids 226 (1998) 122-128
5. Belleville P.F., and Floch H.G. Ammonia-hardening of porous silica antireflective coatings. SPIE 2288 (1994) 25-32
6. Fu T., et al. Preparation of laser frequency tripling antireflective film with high-strength. High Power Laser Particle Beams 32 (2004) 277-280 (in Chinese)
7. Wu G.M., et al. A novel route to control refractive index of sol-gel derived nano-porous silica films used as broadband antireflective coatings. Mater. Sci. Eng. B 78 (2000) 135-139
8. Pettit R.B., et al. In: Klein L.C. (Ed). Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics and Speciality Shapes (1987), Noyes Publications, Park Ridge, NJ 80-109
9. Yoshida K., et al. Mechanism of damage formation in antireflection coatings. J. Appl. Phys. 60 (1986) 1545-1546