Development of a rapid thermal annealing process for polycrystalline silicon thin-film solar cells on glass

Materials Science and Engineering: B

Volumn 159-160, Issue C, 2009, Pages 329-332

  Rau, B ^a   Weber, T ^a   Gorka, B ^a   Dogan, P ^a   Fenske, F ^a   Lee, K Y ^a   Gall, S ^a   Rech, B ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Annealing; Glass; Hydrogen; Silicon; Solar cells; Thin films

Indexed keywords

GLASS; GRAIN BOUNDARIES; HYDROGEN; HYDROGENATION; OPEN CIRCUIT VOLTAGE; POLYCRYSTALLINE MATERIALS; POLYSILICON; RAPID THERMAL ANNEALING; SILICON SOLAR CELLS; SOLAR POWER GENERATION; THIN FILM SOLAR CELLS;

ANNEALING; ANNEALING TEMPERATURES; PERFORMANCE; POLYCRYSTALLINE SILICON THIN FILM; POLYCRYSTALLINE-SI; RAPID THERMAL ANNEALING PROCESS; SI LAYER; SILICON THIN-FILM SOLAR CELLS; THERMAL ANNEALING TREATMENT; THIN-FILMS;

THIN FILMS;

EID: 67349257457     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2008.05.007     Document Type: Article

References (11)

1. Basore P. Proceedings of the 21st European Photovoltaic Solar Energy Conference. Dresden (2006) 544
2. Gall S., Schneider J., Klein J., Hübner K., Muske M., Rau B., Conrad E., Sieber I., Petter K., Lips K., Stöger-Pollach M., Schattschneider P., and Fuhs W. Thin Solid Films 511-512 (2006) 7
3. Nast O., Puzzer T., Koschier L.M., Sproul A.B., and Wenham S.R. Appl. Phys. Lett. 73 (1998) 3214
4. Terry M.L., Straub A., Inns D., Song D., and Aberle A. Appl. Phys. Lett. 86 (2005) 172108
5. Rau B., Lee K.Y., Dogan P., Fenske F., Conrad E., and Gall S. Proceedings of the 22nd European Photovoltaic Solar Energy Conference. Milan (2007) 2010
6. Cubaynes F.N., Stolk P.A., Verhoeven J., Roozeboom F., and Woerlee P.H. Mater. Sci. Semicond. Process. 4 (2001) 351
7. Basore P. Proceedings of the 4th World Conference on Photovoltaic Energy Conversion. Waikoloa (2006) 2089
8. Keevers M.J., Young T.L., Schubert U., and Green M.A. Proceedings of the 22nd European Photovoltaic Solar Energy Conference. Milan (2007) 2010
9. Dogan P., Fenske F., Scheller L.-P., Lee K.Y., Gorka B., Rau B., Conrad E., Gall S., and Rech B. Proceedings of the 22nd European Photovoltaic Solar Energy Conference. Milan (2007) 2019
10. Schott Borofloat® 33 Product information, http://www.schott.com/borofloat.
11. Gorka B., Rau B., Lee K.Y., Dogan P., Fenske F., Conrad E., Gall S., and Rech B. Proceedings of the 22nd European Photovoltaic Solar Energy Conference. Milan (2007) 2024