Student realization in cleanroom of silicon-germanium thin film transistors

Proceedings - 1999 IEEE International Conference on Microelectronic Systems Education: Systems Education in the 21st Century, MSE 1999

Volumn , Issue , 1999, Pages 69-70

  Guillet, D ^a   Mourgues, K ^a   Rogel, R ^a   Lhermite, H ^a   Bonnaud, O ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EDUCATION; GERMANIUM; GERMANIUM ALLOYS; MICROELECTRONICS; SEMICONDUCTING ORGANIC COMPOUNDS; SI-GE ALLOYS; SILICON ALLOYS; THIN FILM CIRCUITS; THIN FILM TRANSISTORS; THIN FILMS;

ACTIVE LAYER; ELECTRICAL CHARACTERISTIC; GRADUATE STUDENTS; PROCESS STEPS; SILICON GERMANIUM;

STUDENTS;

EID: 67349190433     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MSE.1999.787042     Document Type: Conference Paper

References (0)