3D replication using PDMS mold for microcoil

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 920-924

  Lee, Dongkeon ^a,b   Mekaru, Harutaka ^a,b   Hiroshima, Hiroshi ^a,b   Matsumoto, Sohei ^b   Itoh, Toshihiro ^a,b   Takahashi, Masaharu ^a,b   Maeda, Ryutaro ^a,b  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

3D replication; Electroplating; Microcoil; Mold; PDMS

Indexed keywords

3D REPLICATION; BASE COMPONENTS; FABRICATION METHODS; LINE WIDTHS; LOW-COST FABRICATIONS; MICROCOIL; MOLD CAVITIES; MOLD MATERIALS; OUTER DIAMETERS; PDMS; PDMS MOLDS; POLYDIMETHYLSILOXANE PDMS; POST PROCESS; REPLICATION METHODS; THREE-DIMENSIONAL (3D); ULTRAVIOLET CURABLE; UV RESINS;

DATA COMMUNICATION EQUIPMENT; ELECTROPLATING; FABRICATION; MICROCHANNELS; MOLDS; RESINS; SILICONES;

THREE DIMENSIONAL;

EID: 67349174969     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.011     Document Type: Article

References (2)

1. Xia Y., and Whitesides G.M. Annu. Rev. Mater. Sci. 28 (1998) 153
2. Chang F.C., and Su Y.C. J. Micromech. Microeng. 18 (2008) 1