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Volumn 203, Issue 17-18, 2009, Pages 2600-2604
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XPS and AFM surface study of PMMA irradiated by electron beam
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Author keywords
LEE irradiation; PMMA; Roughness; TM AFM; XPS
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Indexed keywords
LEE IRRADIATION;
PMMA;
ROUGHNESS;
TM-AFM;
XPS;
ATOMIC FORCE MICROSCOPY;
ATOMIC SPECTROSCOPY;
ATOMS;
ELECTRON BEAMS;
ELECTRON IRRADIATION;
ELECTRONS;
PHOTORESISTS;
RADIATION;
SURFACE ROUGHNESS;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 67349169982
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2009.02.054 Document Type: Article |
Times cited : (66)
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References (34)
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