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Volumn 9, Issue 2 SUPPL., 2009, Pages
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Nanomaterial-embedded gas sensor fabrication
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Author keywords
Gas sensors; Highly sensitive; Massive production; Nanomaterial
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Indexed keywords
4-IN. SI;
CNT SENSORS;
GAS MOLECULES;
GAS SENSORS;
HIGHLY SENSITIVE;
INK-JET;
MASSIVE PRODUCTION;
METAL DEPOSITION;
NANO-MATERIALS;
NANOMATERIAL;
PPB LEVELS;
ROOM TEMPERATURE;
SI WAFER;
SPONTANEOUS PASSIVATION;
CARBON NANOTUBES;
GAS DETECTORS;
GASES;
NANOSTRUCTURED MATERIALS;
PASSIVATION;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
STRUCTURAL METALS;
TIN;
CHEMICAL SENSORS;
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EID: 67349158761
PISSN: 15671739
EISSN: None
Source Type: Journal
DOI: 10.1016/j.cap.2008.12.028 Document Type: Article |
Times cited : (11)
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References (15)
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