Synthesis of carbon nanotubes on diamond-like carbon by the hot filament plasma-enhanced chemical vapor deposition method

Micron

Volumn 40, Issue 5-6, 2009, Pages 612-616

  Choi, Eun Chang ^a   Park, Yong Seob ^a   Hong, Byungyou ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Catalyst; CNT; DLC; HF PECVD

Indexed keywords

A-CARBON; CATALYST LAYERS; CNT; DIAMOND-LIKE CARBON; DLC; DLC FILM; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HF-PECVD; HIGH RESOLUTION; HOT FILAMENT; HYDROGEN GAS; METAL CATALYST; PRE-TREATMENT; RADIO FREQUENCY PLASMA; RF-PECVD; TEM; TRANSMISSION SCANNING;

ACETYLENE; CARBON NANOTUBES; CATALYSIS; CATALYSTS; COBALT; DIAMONDS; ELECTRONIC PROPERTIES; EMISSION SPECTROSCOPY; FIELD EMISSION; FIELD EMISSION DISPLAYS; FIELD EMISSION MICROSCOPES; FILAMENTS (LAMP); GOLD DEPOSITS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HYDROGEN; LIGHTING; METHANE; PALLADIUM; PLASMA DEPOSITION; PLASMAS; PLATINUM; SCANNING; SCANNING ELECTRON MICROSCOPY; SUPERCONDUCTING FILMS; SYNTHESIS (CHEMICAL); VAPORS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 67349104379     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2009.02.009     Document Type: Article

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