Crystallization behaviors of TiO2 films derived from thermal oxidation of evaporated and sputtered titanium films

Journal of Alloys and Compounds

Volumn 480, Issue 2, 2009, Pages 938-941

  Zhang, Yuanyuan ^a   Ma, Xiangyang ^a   Chen, Peiliang ^a   Yang, Deren ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Crystal structure and symmetry; Thermal analysis; Thin films

Indexed keywords

ANATASE PHASE; CRYSTAL STRUCTURE AND SYMMETRY; CRYSTALLIZATION BEHAVIOR; RUTILE PHASE; THERMAL ANALYSIS; THERMAL OXIDATION; TI FILM; TIO; TITANIUM FILM;

CRYSTALLIZATION; OXIDATION; OXIDE MINERALS; THERMOANALYSIS; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES;

CRYSTAL SYMMETRY;

EID: 67349099474     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2009.02.100     Document Type: Article

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