Thermoelectric properties of MeV Si ion bombarded Bi2Te3/Sb2Te3 superlattice deposited by magnetron sputtering

Surface and Coatings Technology

Volumn 203, Issue 17-18, 2009, Pages 2682-2686

  Zheng, B ^a   Xiao, Z ^a   Chhay, B ^a   Zimmerman, R L ^a   Edwards, Matthew E ^a   ILA, D ^a  

^a ALABAMA A AND M UNIVERSITY   (United States)

Author keywords

3 measurement of thin film thermal conductivity; Ion bombardment; Rutherford backscattering spectroscopy; Themoelectric multilayer superlattice

Indexed keywords

ELECTRICAL CONDUCTIVITIES; ELECTRON DENSITIES; LAYERED STRUCTURES; LOW TEMPERATURES; MINIBAND; NANO-SCALE CLUSTERS; QUANTUM DOTS; QUANTUM WELLS; SUPER-LATTICE FILMS; SUPERLATTICE DEVICES; THEMOELECTRIC MULTILAYER SUPERLATTICE; THERMOELECTRIC FIGURE OF MERITS; THERMOELECTRIC PROPERTIES;

BACKSCATTERING; ELECTRIC CONDUCTIVITY; FILM PREPARATION; ION BOMBARDMENT; IONS; MAGNETRONS; MULTILAYERS; NANOSTRUCTURED MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR QUANTUM DOTS; STOICHIOMETRY; TELLURIUM COMPOUNDS; THERMAL CONDUCTIVITY; THERMOANALYSIS; THERMODYNAMIC PROPERTIES; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY; THIN FILM DEVICES;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 67349098440     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.02.094     Document Type: Article

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