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Volumn 7275, Issue , 2009, Pages

Design ranking and analysis methodology for standard cells and full chip physical optimization

Author keywords

Design ranking; DFM; DFM metrics; Yield scoring

Indexed keywords

ANALYSIS SYSTEM; CHIP DESIGN; CODING METHODS; COMPLEX DESIGNS; DEEP SUB-MICRON; DESIGN RULES; DFM; DFM METRICS; LAYOUT MODIFICATION; LAYOUT OPTIMIZATION; OVERALL DESIGN; PHYSICAL LAYOUT; RELIABILITY PERFORMANCE; SET OF RULES; STANDARD CELL; YIELD SCORING;

EID: 66749190463     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.812972     Document Type: Conference Paper
Times cited : (3)

References (8)
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    • Model-based approach for physical design verification and design/manufacturability cooptimization
    • Perry, D. et al., "Model-based approach for physical design verification and design/manufacturability cooptimization," in [Design for Manufacturability through Design-Process Integration], Proc. SPIE 6521, 6521-131 (2007).
    • (2007) [Design for Manufacturability through Design-Process Integration], Proc. SPIE , vol.6521 , pp. 6521-7131
    • Perry, D.1
  • 3
    • 2642542402 scopus 로고    scopus 로고
    • Infrastructure development and integration of electrical-based dimensional process window checking
    • Doong, K. Y.-Y. et al., "Infrastructure development and integration of electrical-based dimensional process window checking," in [Trans. Semiconduct. Manufact.], IEEE 17, 123-141 (2004).
    • (2004) [Trans. Semiconduct. Manufact.], IEEE , vol.17 , pp. 123-141
    • Doong, K.Y.-Y.1
  • 4
    • 33745785042 scopus 로고    scopus 로고
    • Reticle enhancement verification for the 65nm and 45nm nodes
    • Lucas, K. et al., "Reticle enhancement verification for the 65nm and 45nm nodes," in [Conf. Analysis Techniques], Proc. SPIE 6156, 6156-58 (2006).
    • (2006) [Conf. Analysis Techniques], Proc. SPIE , vol.6156 , pp. 6156-6158
    • Lucas, K.1
  • 5
    • 66749170120 scopus 로고    scopus 로고
    • Implementation of a dfm checker for 65nm and beyond
    • Maitre, P. L. et al., "Implementation of a dfm checker for 65nm and beyond," U2U mentor Graphics meeting (2007).
    • (2007) U2U mentor Graphics meeting
    • Maitre, P.L.1
  • 7
    • 66649133565 scopus 로고    scopus 로고
    • Accurate device simulations through cd-sem-based edge-contour extraction
    • Shauly, E. N. et al., "Accurate device simulations through cd-sem-based edge-contour extraction," in [Conf. CD for development and OPC], Proc. SPIE 6922, 6922-95 (2007).
    • (2007) [Conf. CD for development and OPC], Proc. SPIE , vol.6922 , pp. 6922-6995
    • Shauly, E.N.1
  • 8
    • 66749123610 scopus 로고    scopus 로고
    • Software Version 2007.4
    • Graphics, M., "alibre yieldanalyzer and yieldenhancer reference manual," Software Version 2007.4 (2007).
    • (2007)
    • Graphics, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.