Fabrication of thermoelectric gas sensors on micro-hotplates

Sensors and Actuators, B: Chemical

Volumn 139, Issue 2, 2009, Pages 340-345

  Shin, W ^a   Nishibori, M ^a   Houlet, L F ^a   Itoh, T ^a   Izu, N ^a   Matsubara, I ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Hot plate; SiGe; Thermoelectric; Wafer; Wet etching

Indexed keywords

FABRICATED DEVICE; FABRICATION PROCESS; FABRICATION YIELD; GAS SENSORS; HOT-PLATE; HYDROGEN COMBUSTION; HYDROGEN CONCENTRATION; HYDROGEN GAS SENSORS; LINEAR PHENOMENA; LINEAR RELATIONSHIPS; MASS PRODUCTION; MEMBRANE DEVICES; MICRO DEVICES; MICROHOTPLATES; PLATE-TYPE; POLYMER COATING; ROBUST SENSOR; SENSOR DEVICE; SIGE; TEST METHOD; THERMOELECTRIC; THERMOELECTRIC GAS SENSORS; VALIDATION STUDY; VOLTAGE SIGNALS; WAFER; WORKING PRINCIPLES;

CHEMICAL SENSORS; FABRICATION; GAS DETECTORS; GASES; HYDROGEN; MACHINE TOOLS; PLASTIC COATINGS; PRODUCTION ENGINEERING; PROTECTIVE COATINGS; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SILICON ALLOYS;

WET ETCHING;

EID: 66349097179     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.03.032     Document Type: Article

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