Synergistic sputtering effects during ion bombardment with two ion species

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 13, Issue 3, 1995, Pages 831-833

  Berg, S ^a   Katardjiev, I V ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE OF INCIDENCE; ATOMIC DENSITY; COLLISION CASCADE; DIFFERENT MASS; DYNAMIC MONTE CARLO; ENERGY DEPOSITIONS; ION ENERGIES; ION SPECIES; LOW ENERGIES; LOW MASS; PRIMARY IONS; SECONDARY IONS; SPUTTER YIELDS; SPUTTERING EFFECTS; SPUTTERING YIELDS; STEADY STATE CONCENTRATION; TARGET MATERIALS;

IONS; SECONDARY EMISSION; SPUTTERING; TARGETS;

ION BOMBARDMENT;

EID: 65949112018     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579836     Document Type: Article

References (9)

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9. J. P. Biersack, S. Berg, and C. Nender, Nucl. Instrum. Methods B59, 60, 21(1991).