Starjet: Pneumatic dispensing of nano- To picoliter droplets of liquid metel

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 43-46

  Metz, T ^a   Birkle, G ^b   Zengerle, R ^a,b   Koltay, P ^b  

^a Institute of Micromachining and Information Technology   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FORCE; CONTACT LINES; DEEP REACTIVE ION ETCHING; DIRECTIONAL STABILITY; DROP-ON DEMAND; DROPLET DISPENSER; EXPERIMENTAL VALIDATIONS; GAS FLOWS; LIQUID PLUGS; NOZZLE GEOMETRIES; PICOLITER DROPLETS; PRINT HEAD; SILICON CHIP; WALL-CONTACT; WORKING PRINCIPLES;

ASPECT RATIO; COMPUTATIONAL FLUID DYNAMICS; DISPENSERS; DROP FORMATION; LIQUID METALS; METALS; MICROELECTROMECHANICAL DEVICES; NOZZLES;

REACTIVE ION ETCHING;

EID: 65949105739     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805314     Document Type: Conference Paper

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