Microactuation utilizing wafer-level integrated SMA wires

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 1067-1070

  Clausi, D ^a   Gradin, H ^b   Braun, S ^b   Peirs, J ^a   Stemme, G ^b   Reynaerts, D ^a   Van Der Wifngaart, W ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING PROCESS; CANTILEVER ACTUATORS; COMPLEX COMPOSITIONS; FABRICATED STRUCTURES; HIGH COSTS; LOW COSTS; MASS PRODUCTION; MICROACTUATION; NITI FILMS; PICK-AND-PLACE; SILICON DEVICES; SMA WIRE; TRANSFORMATION TEMPERATURES; WAFER LEVEL; WAFER-SCALE INTEGRATION;

MICROACTUATORS; WIRE;

SILICON WAFERS;

EID: 65949090302     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805571     Document Type: Conference Paper

References (9)

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