Nanoindentation measurement of Young's modulus for compliant layers on stiffer substrates including the effect of Poisson's ratios

Nanotechnology

Volumn 20, Issue 14, 2009, Pages

  Clifford, Charles A ^a   Seah, Martin P ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CLIFFORD; COMPLIANT LAYERS; EFFECT OF POISSON'S RATIOS; ELASTIC SUBSTRATES; FINITE-ELEMENT ANALYSIS; INDENTER; MODULUS VALUES; NANO-INDENTATION MEASUREMENTS; POISSON'S RATIOS; REDUCED MODULUS; SILICON DIOXIDE LAYERS; SPHERICAL INDENTER; TIP RADIUS; TWO-PHASE SYSTEMS; YOUNG'S MODULUS;

POISSON DISTRIBUTION; POISSON EQUATION; POISSON RATIO; SILICA; SUBSTRATES;

NANOINDENTATION;

SILICON; SILICON DIOXIDE;

ARTICLE; ELASTICITY; FINITE ELEMENT ANALYSIS; MATHEMATICAL MODEL; MECHANICAL PROBE; NANOINDENTATION; NANOTECHNOLOGY; POISSON DISTRIBUTION; PRIORITY JOURNAL; YOUNG MODULUS;

EID: 65549105451     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/14/145708     Document Type: Article

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