300 mm moves into the next century

Semiconductor International

Volumn 22, Issue 8, 1999, Pages

  Bakshi, Vivek ^a   Youngson, Derek ^a   Goodall, Randy ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; FACTORY AUTOMATION; PRODUCTIVITY; SILICON WAFERS;

MOORE'S LAW;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 6544245058     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

1. "Demonstration Test Method" - Revision 1, 1997, available at www.sematech org programs.
2. "I300I Factory Guideline Compliance: Factory Integration Maturity Assessment for 300 mm Production Equipment," 1998, available at www.sematech.org programs.
3. "Cost of Ownership for 300 mm Tools," Semiconductor Process, Analysis Characterization and Control, January 24-27, 1999, San Antonio, Texas, USA
4. "300mm Transition," Derek Youngson, Randy Goodall and Vivek Bakshi, Strategic Business Conference, April 26-28, 1999, Welches, Oregon, USA.
5. 300 mm Transition Newsletter, Issue 2, March 1999, published by I300I at www.sematech org programs.
6. GJG documents jointly produced by I300I and J300 (available at www.sematech.org programs)
7. "Impact of the 300mm Scale-Up on IC Fab Process Metrology, and Automation Equipment," Proceedings of Electrochemical Society, 1998.