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Volumn 93, Issue 6-7, 2009, Pages 932-935

Microscopic homogeneity of emitters formed on textured silicon using in-line diffusion and phosphoric acid as the dopant source

Author keywords

Crystalline; Diffusion; Emitter; Silicon

Indexed keywords

CHARACTERIZATION METHODS; CRYSTALLINE; DOPANT SOURCES; EMITTER; EMITTER DIFFUSIONS; IN LINES; MICROSCOPIC HOMOGENEITIES; N-TYPE SILICONS; PHOSPHO-SILICATE GLASS; QUARTZ TUBE FURNACES; SCANNING ELECTRON MICROSCOPES; SEM IMAGES; SILICON SURFACES;

EID: 65349173073     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2008.11.061     Document Type: Article
Times cited : (11)

References (5)
  • 2
    • 0036607445 scopus 로고    scopus 로고
    • Dopant profiling with the scanning electron microscope-a study of Si
    • Elliott S.L., Broom R.F., and Humphreys C.J. Dopant profiling with the scanning electron microscope-a study of Si. Journal of Applied Physics 91 (2002) 9116-9122
    • (2002) Journal of Applied Physics , vol.91 , pp. 9116-9122
    • Elliott, S.L.1    Broom, R.F.2    Humphreys, C.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.