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Volumn 93, Issue 6-7, 2009, Pages 932-935
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Microscopic homogeneity of emitters formed on textured silicon using in-line diffusion and phosphoric acid as the dopant source
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Author keywords
Crystalline; Diffusion; Emitter; Silicon
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Indexed keywords
CHARACTERIZATION METHODS;
CRYSTALLINE;
DOPANT SOURCES;
EMITTER;
EMITTER DIFFUSIONS;
IN LINES;
MICROSCOPIC HOMOGENEITIES;
N-TYPE SILICONS;
PHOSPHO-SILICATE GLASS;
QUARTZ TUBE FURNACES;
SCANNING ELECTRON MICROSCOPES;
SEM IMAGES;
SILICON SURFACES;
ACIDS;
CRYSTALLINE MATERIALS;
DIFFUSION;
DOPING (ADDITIVES);
NONMETALS;
OXIDE MINERALS;
PHOSPHORIC ACID;
QUARTZ;
SCANNING ELECTRON MICROSCOPY;
SURFACE DIFFUSION;
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EID: 65349173073
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.solmat.2008.11.061 Document Type: Article |
Times cited : (11)
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References (5)
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