Application of organic/inorganic hybrid photopolymer to fabricate ultra-high-density patterned substrate

IEEE Transactions on Magnetics

Volumn 45, Issue 5, 2009, Pages 2300-2303

  Lim, Jiseok ^a   Popall, Michael ^b   Kang, Shinill ^a  

^a Yonsei University   (South Korea)

^b FRAUNHOFER INSTITUTE FOR SILICATE RESEARCH ISC   (Germany)

Author keywords

Nano replication; Organic inorganic hybrid photopolymer; Patterned media; UV nano imprinting

Indexed keywords

FABRICATION;

ADHESION PROPERTIES; GEOMETRICAL PROPERTY; NANOREPLICATION; ORGANIC/INORGANIC HYBRIDS; PATTERNED MEDIAS; PATTERNED SUBSTRATES; ULTRAHIGH DENSITY; UV NANO IMPRINTING;

SUBSTRATES;

EID: 65349106481     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2009.2016472     Document Type: Article

References (13)

1. R. H. Victora, J. Xue, and M. Patwari, "Areal density limits for perpendicular magnetic recording, " IEEE Trans. Magn., vol. 38, no. 5, pp. 1886-1891, Sep. 2002.
2. Y. Nakamura and I. Tagawa, "Possibilities of perpendicular magnetic recording," IEEE Trans. Magn., vol. 24, pp. 2329-2334, Nov. 1988.
3. R. L. White, "The physical boundaries to high magnetic recording," J. Magn. Magn. Mater., vol. 209, pp. 1-5, 2000.
4. S. H. Charap, P.-L. Lu, and Y. He, "Thermal stability of recorded information at high densities," IEEE Trans. Magn., vol. 33, no. 1, pp. 978-983, Jan. 1997.
5. R. L. White, R. M. H. New, and R. F. W. Pease, "Patterned media: A viable route to 50 Gbit/in and up for magnetic recording?," IEEE Trans. Magn., vol. 33, no. 1, pp. 990-995, Jan. 1997.
6. C. A. Ross, "Patterned magnetic recording media," Annu. Rev. Mater. Res., vol. 31, pp. 203-235, 2001.
7. B. D. Terris and T. Thomson, "Nanofabricated and self-assembled magnetic structures as data storage media," J. Phys. D, Appl. Phys., vol. 38, pp. R199-R222, 2005.
8. M. V. Kunnavakkam, F. M. Houlihan, M. Schlax, J. A. Liddle, P Kolodner, O. Nalamasu, and J. A. Gogers, "Low-cost, low-loss microlens arrays fabricated by soft-lithography replication process," Appl. Phys. Lett., vol. 82, no. 8, pp. 1152-1154, Feb. 2003.
9. C. Sanchez, B. Julian, P. Belleville, and M. Popall, "Applications of hybrid organic-inorganic nanocomposites," J. Mater. Chem., vol. 15, pp. 3559-3592, 2005.
10. M. Popall, R. Houbertz, L. Frohlich, U. Streppel, P. Dannberg, S. Westenhofer, and M. Gale, "ORMOCERs-Inorganic-organic hybrid materials for integrated, diffractive and refractive microoptics: Synthesis, processing, and applications in optical components," Glass Sci. Technol., vol. 76, pp. 53-58, 2003.
11. J. Haisma, M. Verheijen, K. Heuvel, and J. Berg, "Mold-assisted nanolithography: A process for reliable pattern replication," J. Vac. Sci. Technol. B, vol. 14, no. 6, Nov./Dec. 1996.
12. A. Ulman, "Formation and structure of self-assembled monolayers," Chem. Rev., vol. 96, pp. 1533-1554, 1996.
13. B. J. Kim, M. Liebau, J. Huskens, D. N. Reinhoudt, and J. Brugger, "A self-assembled monolayer-assisted surface microfabrication and release technique," Microelectron. Eng., vol. 57-58, pp. 755-760, 2001.