Standardizing the microsystems technology description

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 163-170

  Liateni, Karim ^a   Thomas, Gabriel ^a   Hoa, Christophe Hui Bon ^a   Bensaude, David ^a  

^a MEMSCAP   (France)

Author keywords

EDA; FEM; Foundries; Microsystems; XML MTD

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; MICROELECTRONIC PROCESSING; STANDARDIZATION; XML;

MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 6444245068     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.462808     Document Type: Conference Paper

References (8)

1. Java and XML