Efficient MEMS design methodology integrating finite elements based macro models into a nodal approach MEMS component design tool

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue 1, 2002, Pages 411-419

  Moulinier, David ^a   Nachtergaele, Philippe ^a   Brutails, Marie Pierre ^a   Bergeon, Stéphane ^a   Maza, Stéphane ^a   Hui Bon Hoa, Christophe ^a  

^a Egypt   (France)

Author keywords

FEM; Library; Microsystems; Multiphysic; Nodal analysis; ROM; Structured methodology

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); FINITE ELEMENT METHOD; MATHEMATICAL MODELS; SYSTEMS ANALYSIS;

NODAL ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 6444244296     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.462838     Document Type: Article

References (12)

1. A surface micromachined silicon accelerometer with on-chip detection circuitry
2. Automated optimal synthesis of microresonators
3. MemsMaster: A new approach to prototype MEMS
4. Analyse des structures par elements finis, third edition