Structural properties of polycrystalline silicon seed layers made on glass by solid-phase crystallisation

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn B, Issue , 2003, Pages 1202-1205

  Roth, K ^a   Goldschmidt, J C ^a   Puzzer, T ^a   Chuangsuwanich, N ^a   Vogl, B ^a   Aberle, A G ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

MICROGRAPHS; POLY-SI SEED LAYERS; SOLID-PHASE CRYSTALLIZATION; THIN-FILM SOLAR CELLS;

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; DOPING (ADDITIVES); ENERGY CONVERSION; GLASS; GRAIN SIZE AND SHAPE; ION BEAMS; PHOSPHORUS; TRANSMISSION ELECTRON MICROSCOPY;

POLYSILICON;

EID: 6444240163     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. A.G. Aberle, P.I. Widenborg, A. Straub, N.P. Harder, "Polycrystalline silicon on glass thin-film solar cell research at UNSW using the seed layer concept", this Conference.
2. T. Matsuyama et al., "Preparation of high-quality n-type poly-Si films by the Solid Phase Crystallization (SPC) method", Jap. J. Appl. Phys. 29, 2327-2331 (1990).
3. T. Matsuyama et al., "High-quality polycrystalline silicon thin film prepared by a solid phase crystallisation method", J. Non-Crystal. Solids 198-200, 940 (1996).
4. R. Bergmann et al., "Polycrystalline silicon on glass substrates for thin-film solar cells", Solid State Phenom. 51-52, 515 (1996).
5. R.B. Bergmann, R.M. Hausner, N. Jensen et al., "High rate, low temperature deposition of crystalline silicon films for thin film solar cells on glass", Proc. 2nd World Conference on Photovoltaic Solar Energy Conversion, Vienna, 1998, p. 1260.
6. J.C. Goldschmidt et al., "Electrical and optical properties of polycrystalline silicon seed layers made on glass by solid-phase crystallisation", this Conference.
7. G. Farhi et al., "Study of the solid phase crystallization behaviour of amorphous sputtered silicon by X-ray diffraction and electrical measurements", Solar Energy Mat. Solar Cells 72, 551-558 (2002).
8. R. Schmidt, "Ausscheidungsphänomene in Werkstoffen" (Deutscher Verlag für Grundstoff-Industrie, Leipzig, 1991).
9. P.I. Widenborg and A.G. Aberle, "Glass texruring method", Australian Provisional Patent Application (filed on 7th April 2003).