Frontiers in HWCVD

Thin Solid Films

Volumn 517, Issue 12, 2009, Pages 3415-3419

  Schropp, R E I ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Cat CVD; Devices; Hot Wire CVD; i CVD; Nanostructures; Polymers; Semiconductors; Thin films

Indexed keywords

CAT-CVD; DEVICES; HOT WIRE CVD; I-CVD; SEMICONDUCTORS;

CRYSTALS; DIAMOND DEPOSITS; ELECTRIC CONDUCTIVITY; FUNCTIONAL POLYMERS; NANOSTRUCTURES; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR MATERIALS; SILICON NITRIDE; THIN FILMS; WIRE;

CHEMICAL VAPOR DEPOSITION;

EID: 64349107476     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.038     Document Type: Article

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