Study on the formation defect of nano imprinted optical waveguide devices and nano-indentation detection

Polymers for Advanced Technologies

Volumn 19, Issue 12, 2008, Pages 1704-1709

  Weng, Y J ^a,b   Weng, Y C ^a   Yang, S Y ^a   Wong, J L ^c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b KAINAN UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Formation defect; Nano indentation; Nanoimprinting; PDMS soft mold; Waveguide

Indexed keywords

FORMATION DEFECT; FORMING DEFECTS; INDENTATION HARDNESS; MATERIAL QUALITIES; NANO-IMPRINT LITHOGRAPHIES; NANOIMPRINTING; OPTICAL TRANSMISSIONS; OPTICAL WAVEGUIDE DEVICES; PDMS SOFT MOLD; STRUCTURAL INTENSITIES;

DEFECTS; FORMING; HARDNESS; INTEGRATED OPTOELECTRONICS; LITHOGRAPHY; MICROCHANNELS; MOLDS; NANOINDENTATION; SILICONES; STRUCTURAL INTEGRITY; VIBRATION MEASUREMENT; WAVEGUIDE COMPONENTS;

OPTICAL WAVEGUIDES;

NANOTECHNOLOGY; OPTICAL PROPERTY; ULTRAVIOLET RADIATION;

EID: 64149092738     PISSN: 10427147     EISSN: 10991581     Source Type: Journal    
DOI: 10.1002/pat.1164     Document Type: Article

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