Etching deep macropores in n-type silicon in short times

ECS Transactions

Volumn 16, Issue 3, 2009, Pages 109-123

  Ossei Wusu, E K ^a   Cojocaru, A ^a   Carstensen, J ^a   Leisner, M ^a   Foll H ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DATA ACQUISITION; SILICON;

MACROPORES; N TYPE SILICON; PARAMETER SPACES; PROCESSING TIME;

ETCHING;

EID: 63849284111     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2982548     Document Type: Conference Paper

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