Fabrication and structural design of micro pressure sensors for Tire Pressure Measurement Systems (TPMS)

Sensors

Volumn 9, Issue 3, 2009, Pages 1382-1393

  Tian, Bian ^a   Zhao, Yulong ^a   Jiang, Zhuangde ^a   Zhang, Ling ^a   Liao, Nansheng ^a   Liu, Yuanhao ^a   Meng, Chao ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

FEM; Piezoresistive; Pressure sensor; TPMS

Indexed keywords

ANISOTROPIC CHEMICAL ETCHING; GLASS ANODIC BONDING; MICRO PRESSURE SENSORS; PIEZO-RESISTIVE; PIEZO-RESISTIVE SENSORS; PIEZORESISTIVE PRESSURE SENSORS; SINGLE SILICON SUBSTRATE; TPMS;

FINITE ELEMENT METHOD; MEASUREMENTS; PRESSURE MEASUREMENT; PRESSURE SENSORS; STRESS CONCENTRATION; STRUCTURAL DESIGN;

PRODUCT DESIGN;

EID: 63849171382     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s90301382     Document Type: Review

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