The monte carlo simulation of a model microactuator driven by rarefied gas thermal effects

AIP Conference Proceedings

Volumn 1084, Issue , 2009, Pages 281-286

  He, Ying ^a   Stefanov, S K ^b   Ota, Masahiro ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

^b INSTITUTE OF MECHANICS   (Bulgaria)

Author keywords

DSMC; Rarefied gas; Rotating MEMS

Indexed keywords

EID: 63849135046     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. rd International Symposium on Micro and Human Sciences, Nagoya, 1992, 35-43.
2. M. Ota, and Noguchi A., "Opto-Microactuator with Low-Thermal-Conductivity Material by Laser Heating", in IMECE'02-32439, ASME International Engineering Congress and Exposition November 17-22, New Orleans, 2002
3. N. Selden, N., C. Ngalade, S. Gimelshein, and A. Ketsdever, Experimental and Computational Observation of Radiometric Forces on a Plate, AIAA paper 2007-4403, 2007, 39 th AIAA Thermophysics Conference, Miami, FL.
4. M. Ota and Y. He, Rotation Induced by Optical-Thermal Energy Conversion with Laser Irradiation under Molecular Gas Conditions, Trans. of JSME, 71, 708, 2005, 1999-2006, in Japanese.
5. M. Ota, Y. He, and S. K. Stefanov, "Monte Carlo Simulation Of Rotation Of A Laser Opto-Microactuator" in Proc. RGD25 Int. Symp., Edited by. A.K. Rebrov and M.S. Ivanov, Publishing House Siberian Branch RAS, 2007, 1134-1139