Relaxation of compressive strain by inclining threading dislocations in Al0.45Ga0.55N epilayer grown on AlN/sapphire templates using graded-AlxGa1-xN/AlN multi-buffer layers

Journal of Physics D: Applied Physics

Volumn 42, Issue 3, 2009, Pages

  Fu, Q M ^a   Peng, T ^a   Mei, F ^a   Pan, Y ^a   Liao, L ^a   Liu, C ^a  

^a WUHAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRAINS; CRACK-FREE; DRIVING FORCES; EDGE THREADING; RADIO FREQUENCIES; THREADING DISLOCATIONS;

ALUMINUM; BUFFER LAYERS; CEMENTS; EPILAYERS; EPITAXIAL GROWTH; MOLECULAR BEAMS; MOLECULAR DYNAMICS; TRANSMISSION ELECTRON MICROSCOPY;

GALLIUM;

EID: 63749130779     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/3/035311     Document Type: Article

References (21)

1. Wang X L, Zhao D G, Jahn U, Ploog K, Jiang D S, Yang H and Liang J W 2007 J. Phys. D: Appl. Phys. 40 1113
2. Tsukihara M, Sumiyoshi K, Okimoto T, Kataoka K, Kawamichi S, Nishino K, Naoi Y and Sakai S 2007 J. Cryst. Growth 300 190
3. Chitnis A, Zhang J P, Adivarahan V, Shatalov M, Wu S, Pachipulusu R, Mandavilli V and Asif Khan M 2003 Appl. Phys. Lett. 82 2565
4. Zhang J P, Hu X, Bilenko Y, Deng J, Lunev A, Gaska R, Shatalov M, Yang J and Khan M A 2004 Appl. Phys. Lett. 85 5532
5. Bilenko Y et al 2005 Japan. J. Appl. Phys. Part 2 44 L98
6. Wang T, Bai J, Parbrook P J and Cullis A G 2005 Appl. Phys. Lett. 87 151906
7. Kuwano N, Tsuruda T, Kida Y, Miyake H, Hiramatsu K and Shibata T 2003 Phys. Status Solidi c 0 2444
8. Sugiura L 1997 J. Appl. Phys. 81 1633
9. Jiang H, Egawa T, Hao M and Liu Y 2005 Appl. Phys. Lett. 87 241911
10. Bai J, Wang T, Parbrook P J, Wang Q, Lee K B and Cullis A G 2007 Appl. Phys. Lett. 91 131903
11. Zhang J P, Wang H M, Gaevski M E, Chen C Q, Fareed Q, Yang J W, Simin G and Asif Khan M 2002 Appl. Phys. Lett. 80 3542
12. Follstaedt D M, Lee S R, Provencio P P, Allerman A A, Floro J A and Crawford M H 2005 Appl. Phys. Lett. 87 121112
13. Asif Khan M, Kuzina J N, Skogman R A, Olson D T, Macmillan M and Choyke W J 1992 Appl. Phys. Lett. 61 2539
14. Zhang J P, Kuokstis E, Fareed Q, Wang H, Yang J, Simin G, Asif Khan M, Gaska R and Shur M 2001 Appl. Phys. Lett. 79 925
15. Angerer H, Brunner D, Freudenberg F, Ambacher O and Stutzmann M 1997 Appl. Phys. Lett. 71 1504
16. Heying B, Wu X H, Keller S, Li Y, Kapolnek D, Keller B P, DenBaars S P and Speck J S 1996 Appl. Phys. Lett. 68 643
17. Cho H K, Lee J Y, Kim K S, Yang G M, Song J H and Yu P W 2001 J. Appl. Phys. 89 2617
18. Chen G T, Chyi J I, Chan C H, Hou C H, Chen C C and Chang M N 2007 Appl. Phys. Lett. 91 261910
19. Lang T, Odnoblyudov M A, Bougrov V E, Romanov A E, Suihkonen S, Sopanen M and Lipsanen H 2006 Phys. Status Solidi a 203 R76
20. Li H D, Tsukihara M, Naoi Y and Sakai S 2001 Japan. J. Appl. Phys. 41 L1332
21. Prokofyeva T, Seon M, Vanbuskirk J, Holtz M, Nikishin S A, Faleev N N, Temkin H and Zollner S 2001 Phys. Rev. B 63 125313