On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity

Sensors and Actuators, B: Chemical

Volumn 138, Issue 1, 2009, Pages 168-173

  Ahn, M W ^a   Park, K S ^a   Heo, J H ^a   Kim, D W ^a   Choi, K J ^a   Park, J G ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Gas sensor; NO2; On chip fabrication; ZnO nanowire

Indexed keywords

ADSORPTION; CHEMICAL SENSORS; DESORPTION; ELECTRIC WIRE; FABRICATION; GAS DETECTORS; GAS SENSING ELECTRODES; GASES; NANOWIRES; PLATINUM; SEMICONDUCTING ZINC COMPOUNDS; TIN; ZINC OXIDE;

AIR BRIDGES; AU CATALYSTS; CONCENTRATION OF; DOPED-ZNO; FAST RECOVERIES; GAS MOLECULES; GAS SENSING PROPERTIES; GAS SENSITIVITIES; GAS SENSOR; NANO BRIDGES; NO2; ON-CHIP FABRICATION; POTENTIAL BARRIERS; SELECTIVE GROWTHS; SENSOR RESISTANCES; SURFACE DEPLETIONS; ZNO; ZNO NANOCRYSTALS; ZNO NANOWIRE;

GAS PERMEABLE MEMBRANES;

EID: 63749125435     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.02.008     Document Type: Article

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