Hydrogen injection and retention in nanocavities of single-crystalline silicon

Journal of Physics D: Applied Physics

Volumn 42, Issue 6, 2009, Pages

  Cerofolini, G F ^a   Romano, E ^a   Narducci, D ^a   Corni, F ^b   Frabboni, S ^b   Ottaviani, G ^b   Tonini, R ^b  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

^b UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TREATMENT; HELIUM; HYDROGEN; OLIGOMERS; PASSIVATION; SILICON WAFERS; WAFER BONDING;

CHEMICAL STATE; GETTERING; HYDROGEN INJECTIONS; INNER SURFACES; LIFETIME CONTROLS; NANO-CAVITIES; SINGLE-CRYSTALLINE SILICONS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 63649152164     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/6/062001     Document Type: Article

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